| 摘要 |
The invention relates to a substrate inspecting device and a transmission illumination device for substrate inspecting device. The substrate inspecting device can be used for preventing infrared light from the infrared light source from transmitting substrate and emitting to the camera, thereby accurately inspecting the substrate. The shape and the arrangment of infrared light can be set in the mode that the view of infrared light source of a CCD camera is covered by the view of the substrate of the CCD camera. However, by the effect of Fresnel lens, the illuminating angle of infrared light emitted from LED elment equipped near the end of the infrered light source deflects to the end directon of the substrate. In addition, the intensify of the infrared light sourface on the end region of the substrate to the substrate is larger than the intensify of the infrared light on the central part of the substrate. |
