发明名称 INTERFERENCE OPTICAL DEVICE, INTERFERENCE OBSERVATION DEVICE, AND INTERFERENCE OBSERVATION METHOD
摘要 An interference observation device 1 is provided with an interference optical device 2, a microscope housing 50, an imaging unit 56, and an objective lens 70. The interference optical device 2 is provided with a housing 10, a light source 13, a light detector 14, beam splitters 15 and 17, a reference mirror 21, and a control unit 31. The interference observation device 1 has a configuration in which the housing 10 of the interference optical device 2 is arranged between an objective lens attachment section 51 comprising an opening and an objective lens 70 that is attached to the objective lens attachment section 51 in a microscope device containing an imaging unit for capturing an image of light that has passed through the objective lens 70.
申请公布号 WO2016121249(A1) 申请公布日期 2016.08.04
申请号 WO2015JP84918 申请日期 2015.12.14
申请人 HAMAMATSU PHOTONICS K.K. 发明人 YAMAUCHI TOYOHIKO;YAMADA HIDENAO
分类号 G01B9/02;G01N21/45;G02B21/00 主分类号 G01B9/02
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