发明名称 SAMPLE CARRYING DEVICE AND VACUUM APPARATUS
摘要 Disclosed herein is a sample carrying device that can easily stow a sample carrying rod in a small space. The sample carrying device 10 includes the sample carrying rod 11 that carries a sample in the left-right direction in a sample compartment and a preparatory sample compartment 4a, a support body 21 that supports the sample carrying rod 11, a case 31 that supports the support body 21 such that the support body 21 can rotate around a rotational axis P perpendicular to the left-right direction, and a third O-ring 36 that is disposed between the support body 21 and the case 31 and seals the sample compartment and the preparatory sample compartment 4a. The sample carrying rod 11can be switched between the use state where it can carry a sample and the stowed state where it does not carry a sample and where it has been moved in the up-down direction from the use state by rotation of the support body 21.
申请公布号 EP3051571(A1) 申请公布日期 2016.08.03
申请号 EP20160153209 申请日期 2016.01.28
申请人 HITACHI HIGH-TECH SCIENCE CORPORATION 发明人 HASUDA, MASAKATSU;IWAHORI, TOSHIYUKI
分类号 H01J37/20 主分类号 H01J37/20
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