| 摘要 |
An interaxis-angle correction method comprising: a reference-sphere measurement step (S10) of scanning, with the sensor (14), a reference-sphere (36) located on the table (12), in the measurement-axis direction at a translation-axis-direction position on the reference-sphere (36) to acquire measurement-axis-direction contour information, and performing the scanning at a plurality of different translation-axis-direction positions on the same reference-sphere, with the table (12) being linearly translated; a peak detection step (S12) of detecting a peak point in the measurement-axis-direction contour information, and performing the detection for each set of measurement-axis-direction contour information; an error information acquisition step (S14) of obtaining information related to the inclination of an actual straight line based on each peak point with respect to an ideal straight line; a correction information acquisition step (S16) of obtaining correction information for correcting a measurement error related to the position in the measurement-axis direction, caused by the inclination of the actual straight line; and a correction step (S20). |
