| 摘要 |
The vibration and oscillation insulation system (74) supports a machine (72) mass on the ground (9), with stationary (75) and moving (73) masses e.g. a lithography assembly to illuminate wafers on a solid base. The moving machine section shows an inertial force within the machine. A sensor (79) registers oscillations at the base mass, an actuator (8) influences base mass oscillation, both linked to a control (81). The actuator is controlled by a feed forward system. The base mass of the worktable (70) is reduced to the mass of an interface (71). |
