| 摘要 |
Provided are a method for manufacturing graphene grown on a substrate without catalyst and graphene grown on a substrate without catalyst. The method for manufacturing graphene grown on a substrate without catalyst comprises the following steps of: (1) arranging a catalyst-free layer on a substrate; (2) providing an etching gas and a carbon-containing gas, and conducting chemical vapor deposition (CVD); (3) supplying an etching gas for the catalyst-free layer when supplying the carbon-containing gas, and growing graphene on the catalyst-free layer; and (4) continuously conducting CVD from the process of the step (3), and growing graphene on the substrate without the catalyst-free layer by continuously removing all of the catalyst-free layer by the etching gas. |
