发明名称 物理量センサーおよび電子機器
摘要 A physical quantity sensor includes: a fixed portion; a fixed electrode portion; and a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis.
申请公布号 JP5962900(B2) 申请公布日期 2016.08.03
申请号 JP20120084156 申请日期 2012.04.02
申请人 セイコーエプソン株式会社 发明人 田中 悟
分类号 G01P15/125;B81B3/00;G01P15/08;H01L29/84 主分类号 G01P15/125
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