| 摘要 |
PROBLEM TO BE SOLVED: To enable an operation for matching a photographing condition of a height image to be simply and accurately performed.SOLUTION: The measurement microscope device comprises: template storage means that stores a template generated by template generation means; template calling means that causes a desired template to be selected from one or more templates stored in the template storage means, performs alignment in a plane direction to a newly acquired height image by an alignment image stored in the selected template image to thereby determine arrangement positions of a plane measurement tool and a height measurement tool in the plane direction, and performs alignment in a height direction by the alignment image to determine an arrangement position of the height measurement tool in the height direction; and measurement means for executing a measurement of a plane dimension and a height dimension on the basis of a measurement object factor extracted by one or more plane measurement tools and one or more height measurement tools having the arrangement position determined by the template calling means. |
