发明名称 BONDING APPARATUS AND BONDING METHOD
摘要 The present invention is to detect a slope of a collet by a simple configuration. According to the present invention, the bonding device has a die moving unit with a collet capable of adsorbing a die, a protrusion installed in a location capable of contacting the collet, and a determining unit configured to determine a slope of the collet based on each height when a plurality of locations of the collet contact the protrusion. Therefore, the bonding device can improve a throughput even when laminated bonding is performed by a plurality of mounting devices.
申请公布号 KR20160091811(A) 申请公布日期 2016.08.03
申请号 KR20150175961 申请日期 2015.12.10
申请人 FASFORD TECHNOLOGY CO., LTD. 发明人 MAKI HIROSHI;MOCHIZUKI TAKEHITO;OHKUBO TATSUYUKI
分类号 H01L23/00;H01L21/52;H01L21/66;H01L21/677 主分类号 H01L23/00
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