发明名称 |
BONDING APPARATUS AND BONDING METHOD |
摘要 |
The present invention is to detect a slope of a collet by a simple configuration. According to the present invention, the bonding device has a die moving unit with a collet capable of adsorbing a die, a protrusion installed in a location capable of contacting the collet, and a determining unit configured to determine a slope of the collet based on each height when a plurality of locations of the collet contact the protrusion. Therefore, the bonding device can improve a throughput even when laminated bonding is performed by a plurality of mounting devices. |
申请公布号 |
KR20160091811(A) |
申请公布日期 |
2016.08.03 |
申请号 |
KR20150175961 |
申请日期 |
2015.12.10 |
申请人 |
FASFORD TECHNOLOGY CO., LTD. |
发明人 |
MAKI HIROSHI;MOCHIZUKI TAKEHITO;OHKUBO TATSUYUKI |
分类号 |
H01L23/00;H01L21/52;H01L21/66;H01L21/677 |
主分类号 |
H01L23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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