发明名称 除振装置
摘要 The present invention provides an anti-vibration apparatus including an anti-vibration base, a plurality of supporting mechanisms configured to support the anti-vibration base, a plurality of actuators configured to apply a force to the anti-vibration base, an obtaining unit configured to obtain vibration data which represents vibrations on the anti-vibration base, a first calculation unit configured to calculate, based on the vibration data obtained by the obtaining unit, a force to be applied to the anti-vibration base so as to reduce the vibrations on the anti-vibration base, and a distribution unit configured to distribute the force calculated by the first calculation unit to forces to be applied by the plurality of actuators to the anti-vibration base.
申请公布号 JP5963600(B2) 申请公布日期 2016.08.03
申请号 JP20120170384 申请日期 2012.07.31
申请人 キヤノン株式会社 发明人 古本 光宏;浅野 俊哉;江本 圭司
分类号 F16F15/02;H01L21/027 主分类号 F16F15/02
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