| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a multibeam array is not a perfect square matrix, it is necessary to control an ON/OFF signal of each beam in independent timing at a fixed scan speed, the quantity of control data is huge, sharpness at an edge of a pattern is different between a scanning direction and a non-scanning direction, and it is difficult to draw a pattern with a high accuracy.SOLUTION: A square grid matrix beam group is formed within a two-dimensional plane of an interval that is an integer multiple of a beam size, from electron beams from an electron gun 1. An individual blanker 13 of a mesh of a device to be drawn is turned ON/OFF in accordance with a bitmap signal and a desired beam is obtained. Furthermore, beams are deflected to required positions by deflection devices 17, 18 and after a beam state becomes stationary, general blankers 16 are opened for irradiation with beams, thereby obtaining a high-accuracy and high-speed drawing pattern. |
