| 摘要 |
PROBLEM TO BE SOLVED: To provide a transporting device with an improved transporting performance.SOLUTION: A transporting device 10 is provided with a ceramic member 200. In the ceramic member 200, attraction electrodes 372, 374, 376, 378 are formed on a ceramic layer 296, and a gas communication path 630 is formed on a ceramic layer 294. A gas emission hole 650 is formed on an opposite face 233 positioned nearer a bottom face 216 than an opposite face 234. |
