发明名称 DEICING OF RADIATION DETECTORS IN ANALYTICAL INSTRUMENTS
摘要 In an analytical instrument having a radiation detector, such as an electron microscope with an X-ray detector, a thermoelectric element (such as one or more Peltier junctions) is driven by a cooling power supply to cool the detector and thereby decrease measurement noise. Oil condensates and ice can then form on the detector owing to residual water vapor and vacuum pump oil in the analysis chamber, and these contaminants can interfere with measurement accuracy. To assist in reducing this problem, the thermoelectric element can be powered in the reverse of its cooling mode, thereby heating the detector and evaporating the contaminants. After the detector is cleared of contaminants, it may again be cooled and measurements may resume. Preferably, the thermoelectric element is heated by a power supply separate from the one that provides the cooling power, though it can also be possible to utilize a single power supply to provide both heating and cooling modes.
申请公布号 EP2021830(B1) 申请公布日期 2016.08.03
申请号 EP20070867114 申请日期 2007.05.09
申请人 THERMO ELECTRON SCIENTIFIC INSTRUMENTS LLC 发明人 HOWARD, JAMES V.;JACOBS, TOM;MISENHEIMER, MARK E.;ROHDE, DAVID B.;WEBER, BRUCE R.
分类号 G01T1/24;F17C13/00;F25B21/04;H01J37/244;H01L25/00;H01L27/00;H01L27/146;H02B1/00;H02B1/56;H05K7/20 主分类号 G01T1/24
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