| 摘要 |
PROBLEM TO BE SOLVED: To efficiently prevent an increase in particles contained in a process liquid without wastefully consuming the process liquid.SOLUTION: A liquid processing apparatus comprises: a supply pipeline 51 connecting between a resist container 60 and a process liquid supply nozzle 7; a filter device 52a interposed in the supply pipeline; a pump P interposed in the supply pipeline on a secondary side of the filter device; a circulation pipeline 55 between a secondary side of the pump and a primary side of the filter device; a supply control valve 57 interposed on a secondary side of the pump; an on-off valve V35 provided on a discharge side of the pump, and capable of selectively supplying a process liquid to the circulation pipeline; a switching valve V6 provided, on a primary side of the filter device, in the supply pipeline on a secondary side of a connection between the circulation pipeline and the supply pipeline; and a controller 200 for controlling the pump, the supply control valve, the on-off valve and the switching valve. While the supply control valve, the on-off valve and the switching valve are closed, driving of drive means of the pump allows a pump part to have negative pressure to thereby make fine bubbles existing in the process liquid apparent. |
