| 摘要 |
The invention relates to a highly accurate physical quantity sensor (1) which can ensure reliability in strength and reduce resistance changes caused by stresses. Assuming, with respect to stress à imposed on a substrate (2) in a predetermined direction (e.g., direction in which maximum stress is imposed), a parallel direction to be a horizontal direction and a perpendicular direction to be a vertical direction, each of resistors (6, 7a, 7b, 8a, 8b) of the sensor (1) has a horizontal resistance component R1 and a vertical resistance component Rt. When a ratio of a piezoresistance coefficient À1 of the horizontal resistance component R1, which is provided when the stress imposed on the substrate (2) is applied to the horizontal resistance component R1, to a piezoresistance coefficient Àt of the vertical resistance component Rt, which is provided when the stress is applied to the vertical resistance component Rt, is À1 : Àt = - n : 1 (n: integer), a resistance value ratio of the vertical resistance component Rt to the horizontal resistance component R1 is set substantially equal to the ratio of the piezoresistance coefficient Àl to Àt. |
