摘要 |
An imprint method of, in a state in which an indented surface of a mold comes in contact with a to-be-transferred surface of a to-be-transferred object, irradiating the to-be-transferred surface with electromagnetic waves to soften the to-be-transferred surface, and transferring an indented shape of the indented surface to the to-be-transferred surface, includes a heating layer forming step of forming, on the indented surface, a heating layer which absorbs the electromagnetic waves and generates heat; and a softening step of irradiating the heating layer with the electromagnetic waves, through the mold or the to-be-transferred object, at least one of the mold and the to-be-transferred object being made of a material which transmits the electromagnetic waves, causing the heating layer to generate heat, and softening the to-be-transferred surface. |