发明名称 Imprint method
摘要 An imprint method of, in a state in which an indented surface of a mold comes in contact with a to-be-transferred surface of a to-be-transferred object, irradiating the to-be-transferred surface with electromagnetic waves to soften the to-be-transferred surface, and transferring an indented shape of the indented surface to the to-be-transferred surface, includes a heating layer forming step of forming, on the indented surface, a heating layer which absorbs the electromagnetic waves and generates heat; and a softening step of irradiating the heating layer with the electromagnetic waves, through the mold or the to-be-transferred object, at least one of the mold and the to-be-transferred object being made of a material which transmits the electromagnetic waves, causing the heating layer to generate heat, and softening the to-be-transferred surface.
申请公布号 EP2101216(B1) 申请公布日期 2016.07.27
申请号 EP20090250665 申请日期 2009.03.10
申请人 RICOH COMPANY, LTD. 发明人 DEGUCHI, HIROSHI;TANAKA, KAWORI
分类号 G03F7/00 主分类号 G03F7/00
代理机构 代理人
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