| 摘要 |
The present invention relates to a method for manufacturing an exhaust gas pipe for semiconductor manufacturing equipment and, more specifically, to a method for manufacturing an exhaust gas pipe for semiconductor manufacturing equipment, which prevents corrosion inside a pipe due to toxic and corrosive exhaust gas generated during semiconductor manufacturing processes, prevents attachment of powder by-products, and uses fluorine resin powder instead of an existing fluorine resin liquid, simplifying manufacturing processes, and obtaining an excellent film coating feature. |
