Apparatus and methods for defining a plasma

摘要

An apparatus for curing material on a moving web substrate 2 comprises a support drum 10 arranged to transport the substrate 2 and a plasma generator arranged to generate plasma 6a & 6b. An electrode 22 is arranged to bias ions within the plasma towards the moving substrate 2 to form an ion flux. A magnetic array 21 is also positioned within the support drum 10 to define the plasma/ion flux into a racetrack shape adjacent the substrate surface.