A MONOLITHIC RADIATION SENSOR TO DETECT MULTIPLE RADIATION AND METHOD OF PRODUCING THE SAME

摘要

Disclosed are a monolithic radiation sensor to detect different radiations and a manufacturing method thereof. The monolithic radiation sensor to detect different radiations comprises: a semiconductor substrate; one or more lower electrodes which are formed on the bottom surface of the semiconductor substrate; multiple upper electrodes which are formed on the top surface of the semiconductor substrate to be electrically connected to the lower electrodes; and sensing membranes which are arranged on the top of the upper electrodes to react with the materials different from each other.