发明名称 |
FINE STRUCTURE, OPTICAL MEMBER, ANTIREFLECTION FILM, WATER-REPELLENT FILM, SUBSTRATE FOR MASS SPECTROMETRY, PHASE PLATE, PROCESS FOR PRODUCING FINE STRUCTURE, AND PROCESS FOR PRODUCING ANTIREFLECTION FILM |
摘要 |
Provided are an antireflection film having a high antireflection effect and a production process therefor, an optical member excellent in antireflection effect, a water-repellent film having excellent water repellency, a substrate for mass spectrometry having high detection sensitivity, a high-accuracy phase plate, and a fine structure that can be used in the foregoing and a production process therefor. The fine structure is a structure, including multiple conical portions on a surface thereof, in which the conical portions have a mesostructure; and the mesostructure includes a structure having mesopores. |
申请公布号 |
EP2870493(A4) |
申请公布日期 |
2016.07.20 |
申请号 |
EP20130813172 |
申请日期 |
2013.07.03 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KURODA, KAZUYUKI;KITAMURA, SHIN;MIYATA, HIROKATSU;TAKAHASHI, MASAHIKO;KANNO, YOSUKE |
分类号 |
G02B1/11;G02B1/10 |
主分类号 |
G02B1/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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