发明名称 FINE STRUCTURE, OPTICAL MEMBER, ANTIREFLECTION FILM, WATER-REPELLENT FILM, SUBSTRATE FOR MASS SPECTROMETRY, PHASE PLATE, PROCESS FOR PRODUCING FINE STRUCTURE, AND PROCESS FOR PRODUCING ANTIREFLECTION FILM
摘要 Provided are an antireflection film having a high antireflection effect and a production process therefor, an optical member excellent in antireflection effect, a water-repellent film having excellent water repellency, a substrate for mass spectrometry having high detection sensitivity, a high-accuracy phase plate, and a fine structure that can be used in the foregoing and a production process therefor. The fine structure is a structure, including multiple conical portions on a surface thereof, in which the conical portions have a mesostructure; and the mesostructure includes a structure having mesopores.
申请公布号 EP2870493(A4) 申请公布日期 2016.07.20
申请号 EP20130813172 申请日期 2013.07.03
申请人 CANON KABUSHIKI KAISHA 发明人 KURODA, KAZUYUKI;KITAMURA, SHIN;MIYATA, HIROKATSU;TAKAHASHI, MASAHIKO;KANNO, YOSUKE
分类号 G02B1/11;G02B1/10 主分类号 G02B1/11
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