摘要 |
A piezoelectric bending actuator 1 comprises a plurality of actors 2 with a composite Structure. Each actor 2 has at least a first planar outer layer 10 of piezoelectric material bonded to a planar reinforcement layer 14, an electrically conductive outer coating 18 on an external surface of the first planar outer layer defining a tongue portion in the plane of the coating and wherein each of the actors are connected to and extend from a support element 8. The actors 2 can be individually controlled. In addition, there may composite actuators comprising from five to one hundred in number. In some embodiments actors 2 on respective actuators are connected to a linkage arranged to transfer a force or displacement. The disclosed actuators may be used in micro motors and in pneumatic or fluidic valve arrays. |