发明名称 ウエハの永久接合方法
摘要 A method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate according to the following steps: forming a reservoir in a surface layer on the first contact surface, at least partially filling the reservoir with a first educt or a first group of educts, contacting the first contact surface with the second contact surface for formation of a prebond connection, and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with a second educt contained in a reaction layer of the second substrate.
申请公布号 JP5955866(B2) 申请公布日期 2016.07.20
申请号 JP20130549719 申请日期 2011.01.25
申请人 エーファウ・グループ・エー・タルナー・ゲーエムベーハー 发明人 トマス・プラハ;クルト・ヒンゲル;マルクス・ウィンプリンガー;クリストフ・フルートゲン
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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