Friction vacuum pump

摘要

The pump has a rotor (2) rotatably supported by a rolling bearing (4), and comprising a case (10) that is fastened at a hub (8). A stator (20) is concentrically arranged to the case under formation of a gap (30) with a gap width (100), where the gap width is decreased to the rolling bearing. A permanent magnet bearing is attached to an end (12) of the case for supporting the rotor, where another end (14) of the case is arranged at height of the rolling bearing. A turbo-molecular pumping structure is provided between the hub and the permanent magnet bearing.