| 摘要 |
Provided is an apparatus for depositing an organic material on a substrate in a vacuum environment. The deposition apparatus has: an evaporation chamber for heating and evaporating the organic material, the evaporation chamber being filled with the organic material; and a guide part for guiding to the substrate the organic material in the form of steam generated in the evaporation chamber. The evaporation chamber is continually maintained at a lower temperature than the guide part. |
