CERAMIC GAS DISTRIBUTION PLATE WITH EMBEDDED ELECTRODE

摘要

A gas distribution plate for a substrate processing system comprises a ceramic lower portion of the gas distribution plate including a plurality of ceramic green sheets. A ceramic upper portion of the gas distribution plate includes a plurality of ceramic green sheets. An electrode is printed on at least one of an upper surface of the ceramic lower portion and a lower surface of the ceramic upper portion by using metal screen printing. A plurality of first through holes are machined through the ceramic lower portion and the ceramic upper portion of the gas distribution plate before sintering.