发明名称 半導体装置とその製造方法
摘要 An object is to provide a fin integrated type semiconductor device and a method of manufacturing the same, which are provided with a simple structure and good heat dissipation characteristics. The semiconductor device includes: a base plate on which fins arranged in a standing condition are formed on a first main face; an insulating layer formed on a second main face of the base plate, the second main face being opposite to the first main face of the base plate; a circuit pattern fixed to the insulating layer; and a semiconductor element joined to the circuit pattern. The fins are formed with slits that pass through in the thickness direction of the fins.
申请公布号 JP5955343(B2) 申请公布日期 2016.07.20
申请号 JP20130556188 申请日期 2012.07.25
申请人 三菱電機株式会社 发明人 山本 圭;多田 和弘;古森 秀樹;木村 享;後藤 正喜;芳原 弘行
分类号 H01L23/36;H01L23/28;H01L23/29 主分类号 H01L23/36
代理机构 代理人
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