发明名称 |
METHOD AND APPARATUS FOR MACHINING A WORKPIECE |
摘要 |
The invention is method, and an apparatus for performing the method having the steps of providing a workpiece, generating a plurality of free electrons at a region of the exterior surface, and machining a portion of the workpiece adjoining the first region by directing laser energy onto the workpiece. |
申请公布号 |
EP2897760(A4) |
申请公布日期 |
2016.07.20 |
申请号 |
EP20130845791 |
申请日期 |
2013.09.23 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
ZHANG, HAIBIN;SIMENSON, GLENN |
分类号 |
B23K26/38;B23K26/00;B23K26/04;B23K26/08;B23K26/386;B23K26/40;B23K103/00;B23K103/08 |
主分类号 |
B23K26/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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