| 摘要 |
PROBLEM TO BE SOLVED: To make it easy to grasp a position, a transfer source and a transfer destination of each of a carrier and boat during transferring.SOLUTION: A substrate processing apparatus comprises: a transfer system for transferring a substrate; an operation part for displaying an operation state of the transfer system on an operation screen; and a control part for controlling an operation of the transfer system. The control part transmits when transfer by the transfer system starts, a transfer start message including information to identify a transfer source and a transfer destination of the transfer system to the operation part; transfers when transfer by the transfer system ends, a transfer end message including transfer end information of the transfer system to the operation part; and creates when transfer failure of the transfer system occurs, a failure occurrence notice message including a value of a transfer enable/disable flag and contents of a factor list and transfer source/transfer destination information and transmits the failure occurrence notice message to the operation part. |
