发明名称 |
Method for growing beta phase of gallium oxide (ß-Ga2O3) single crystals from the melt contained within a metal crucible by controlling the partial pressure of oxygen. |
摘要 |
A method for growing beta phase of gallium oxide (²-Ga 2 O 3 ) single crystals from the melt contained within a metal crucible surrounded by a thermal insulation and heated by a heater. A growth atmosphere provided into a growth furnace has a variable oxygen concentration or partial pressure in such a way that the oxygen concentration reaches a growth oxygen concentration value (C2, C2', C2") in the concentration range (SC) of 5 - 100 vol. % below the melting temperature (MT) of Ga 2 O 3 or at the melting temperature (MT) or after complete melting of the Ga 2 O 3 starting material adapted to minimize creation of metallic gallium amount and thus eutectic formation with the metal crucible. During the crystal growth step of the ²-Ga 2 O 3 single crystal from the melt at the growth temperature (GT) the growth oxygen concentration value (C2, C2', C2") is maintained within the oxygen concentration range (SC). |
申请公布号 |
EP3042986(A1) |
申请公布日期 |
2016.07.13 |
申请号 |
EP20150150582 |
申请日期 |
2015.01.09 |
申请人 |
FORSCHUNGSVERBUND BERLIN E.V. |
发明人 |
GALAZKA, ZBIGNIEW, DR.;UECKER, REINHARD, DR.;KLIMM, DETLEF, DR.;BICKERMANN, MATTHIAS, PROF.DR. |
分类号 |
C30B29/16;C30B11/00;C30B15/20;C30B17/00 |
主分类号 |
C30B29/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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