DETACHING METHOD AND DETACHING APPARATUS

摘要

The purpose of the present invention is to simply optimize an operation of an individual detaching unit according to the arrangement of the detaching unit in a detaching method and a detaching device to separate two bonded plate bodies. A maintaining unit (30) maintains a control body WK by maintaining a first plate body BL and makes a contact member (340) touched with a second plate body SB. A quantum is separated since a plurality of detaching units (51-5N) arranged along a detaching direction which is parallel to a main area of the contact body WK gradually maintains the second plate body SB in response to the movement of the contact member (340) in the detaching direction and moves in a direction separated from the first plate body BL. A moving start timing of each of the detaching unit (51-5N) is decided by executing the movement of the contact member (340) in advance and measuring the position information for showing the position of the contact member (340) during the movement and a timing when the contact member (34) passes through a corresponding position with the detaching units (51-5N).