发明名称 N-TYPE SIC SINGLE CRYSTAL AND METHOD FOR PRODUCING SAME
摘要 A n-type SiC single crystal with low resistivity and low threading dislocation density is provided, which is achieved by a n-type SiC single crystal containing germanium and nitrogen, wherein the density ratio of the germanium and the nitrogen [Ge/N] satisfies the relationship 0.17 < [Ge/N] < 1.60.
申请公布号 EP3040452(A1) 申请公布日期 2016.07.06
申请号 EP20140839731 申请日期 2014.07.23
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA 发明人 SHIRAI, TAKAYUKI
分类号 C30B29/36;C30B9/10;C30B17/00;C30B19/04;C30B19/06;C30B19/12 主分类号 C30B29/36
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