发明名称 光電場増強デバイスを用いた測定装置
摘要 An optical electric field enhancing device is used with a measuring method which includes two-dimensionally scanning a surface in in-plane direction of the surface to detect, from the rear surface side of the device, signal light emitted from each scanning point when excitation light is applied, and obtaining a two-dimensional signal image on the surface based on the detected signal light. The device includes a transparent substrate, a marker pattern directly formed on the transparent substrate and extending in a direction non-parallel to the main scanning direction of the two-dimensional scanning, and fine uneven structures formed on the marker pattern and the transparent substrate where at least the surface is made of a metal film.
申请公布号 JP5947182(B2) 申请公布日期 2016.07.06
申请号 JP20120217669 申请日期 2012.09.28
申请人 富士フイルム株式会社 发明人 納谷 昌之;山添 昇吾
分类号 G01N21/01;G01N21/65 主分类号 G01N21/01
代理机构 代理人
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