发明名称 |
MOSFET devices and method to fabricate them |
摘要 |
A semiconductor device is disclosed. The device comprises a first MOSFET transistor. The transistor comprises a substrate, a first high-k dielectric layer upon the substrate, a first dielectric capping layer upon the first high-k dielectric, and a first gate electrode made of a semiconductor material of a first doping level and a first conductivity type upon the first dielectric capping layer. The first dielectric capping layer comprises Scandium. |
申请公布号 |
EP2040300(B1) |
申请公布日期 |
2016.07.06 |
申请号 |
EP20080156018 |
申请日期 |
2008.05.09 |
申请人 |
IMEC;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHANG, SHIH-HSUN;RAGNARSSON, LARS-AKE |
分类号 |
H01L29/51;H01L21/28;H01L21/8238;H01L29/49 |
主分类号 |
H01L29/51 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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