发明名称 NEGATIVE-TYPE PHOTORESIST COMPOSITION
摘要 The present invention relates to a negative-type photoresist composition, and more specifically, to a negative-type photoresist composition comprising an alkali-soluble resin, a photopolymerizable compound, a photopolymerization initiator, a photoacid generator, and a monofunctional compound having at least one epoxy group, oxetane group, or vinyl ether group within a molecular structure. The composition does not control physical properties of a non-exposure part, but controls physical properties of an exposure part. The composition is capable of improving sensitivity by lowering developing properties of the exposure part. The composition solves a brittle problem that the exposure part is caked due to conventional crosslinking, and is capable of being desirably applied to a filed requiring flexibility since there is not an excessive increase in the curing extent after performing the post-bake process.
申请公布号 KR20160079319(A) 申请公布日期 2016.07.06
申请号 KR20140190527 申请日期 2014.12.26
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 CHOI, HAN YOUNG;CHO, YONG HWAN;CHOI, HWA SUP;KIM, SANG TAE;HWANG, SANG MAN
分类号 G03F7/038;G03F7/027 主分类号 G03F7/038
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