| 摘要 |
A defoaming apparatus according to an embodiment of the present invention comprises: a chemical liquid tank for storing a chemical liquid containing a solvent and a solute; a cooling tank connected to the chemical liquid tank; a vacuum pump connected to the cooling tank; and a controller for controlling the movement of the solvent by alternately operating a first mode and a second mode, wherein, in the first mode, the controller controls such that the bubbles and volatilized solvent inside the chemical liquid tank are moved to the cooling tank and the volatilized solvent is phase-transformed into a liquefied solvent in the cooling tank, and in the second mode, the controller controls such that the liquefied solvent is moved to the chemical liquid tank from the cooling tank. The defoaming apparatus according to an embodiment of the present invention can suppress the formation of a film, which may occur in a defoaming procedure of the chemical liquid, can reduce the defoaming time, and can significantly improve efficiency. |
