发明名称 METHOD AND DEVICE FOR PREFIXING SUBSTRATES
摘要 The invention relates to a method and to a device for prefixing substrates (1, 2), wherein at least one surface (1o, 2o) of the substrate (1, 2) is amorphized in at least one surface area, characterised in that the substrates (1, 2) are aligned such that they in contact with and prefixed subsequently on the amorphized surface areas.
申请公布号 WO2016101992(A1) 申请公布日期 2016.06.30
申请号 WO2014EP79110 申请日期 2014.12.23
申请人 EV GROUP E. THALLNER GMBH 发明人 LINDNER, FRIEDRICH, PAUL
分类号 H01L21/67 主分类号 H01L21/67
代理机构 代理人
主权项
地址