发明名称 APPARATUS AND METHOD FOR MANAGING A TEMPERATURE PROFILE USING REFLECTIVE ENERGY IN A THERMAL DECOMPOSITION REACTOR
摘要 Embodiments of a reflective surface and a reflector comprising a reflective surface for use in a thermal decomposition reactor are disclosed. Methods for using the reflective surface, or reflector comprising the reflective surface, to manage a temperature profile in a silicon rod grown in the thermal decomposition reactor are also disclosed. The reflective surface is configured to receive radiant heat energy emitted from an energy emitting region of an elongated polysilicon body grown during chemical vapor deposition onto a silicon filament and reflect at least a portion of the received radiant heat energy to a reflected energy receiving region of the elongated polysilicon body or to a reflected energy receiving region of a second elongated polysilicon body, to thereby add radiant heat energy to the reflected energy receiving region.
申请公布号 WO2016106337(A1) 申请公布日期 2016.06.30
申请号 WO2015US67423 申请日期 2015.12.22
申请人 REC SILICON INC 发明人 TROUTMAN, TIMOTHY;LOUSHIN, BRYAN, J.;RUSCHETTI, JOE
分类号 H01L21/205 主分类号 H01L21/205
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