ACTUATOR, MACHINE TOOL, MEASURING APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND FLAT DISPLAY MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an actuator which prevents foreign objects from entering thereinto and prevents dust emission occurring therein from flowing out to an exterior part in a more secure manner.SOLUTION: An actuator 1 includes: a seal part 217 where an outer cylinder part 112 formed in a rotor housing 10 and an inner cylinder part 211 formed in a stator housing 20 overlap with each other in a radial direction through a first gap 218; and an exhaust hole 214 for suctioning/exhausting air in an interior space enclosed by the rotor housing 10 and the stator housing 20.SELECTED DRAWING: Figure 2