| 摘要 |
PROBLEM TO BE SOLVED: To provide a display control system, a substrate processing system, and a display control method that are capable of improving operability of a substrate processing apparatus.SOLUTION: A display control system 500 comprises: at least two of a control device 510 for controlling operation of a CMP device for processing a substrate, a collection device 520 for collecting data to be used by the CMP device, a detection device 530 for detecting a polishing end point of the substrate, and a measurement device 540 for measuring the substrate's thickness; and display control software 516 for controlling display of a plurality of images processed by at lest two devices. The display control software 516 collects a plurality of images and displays the plurality of collected images on a single display device 517 so as to be capable of replacing the images.SELECTED DRAWING: Figure 4 |
