CONTINUOUS WEB APPARATUS AND METHOD USING AN AIR TO VACUUM SEAL AND ACCUMULATOR

摘要

A deposition apparatus includes an input spool located in non-vacuum input module, at least one vacuum process module, an accumulator, and an air to vacuum sealing mechanism. The accumulator and the sealing mechanism are configured to continuously provide a web substrate from the input spool at atmosphere into the at least one process module at vacuum without stopping the web substrate.

主权项

1. A layer deposition method, comprising:
passing a web substrate from an input module not under vacuum to an output module not under vacuum through an accumulator and through at least one process module under vacuum, such that the web substrate continuously extends from the input module to the output module while passing through the accumulator and the at least one process module; removing a first roll of the web substrate from an input spool in the input module; mounting a second roll of the web substrate on the input spool; attaching a trailing edge of the web substrate from the first roll which is removed from the input spool to a leading edge of the web substrate from a second roll which is mounted on the input spool; changing a length of a path of the trailing edge of the web substrate from the first roll in the accumulator during the steps of removing, mounting and attaching such that the web substrate passes through the at least one process module during the steps of removing, mounting and attaching without stopping; and depositing at least one layer on the web substrate moving through the at least one process module during the steps of removing, mounting and attaching.