| 摘要 |
Provided is a technology of achieving a highly sensitive acceleration sensor. Specifically, a fixed section FU1A and a mass body MS are connected to each other by means of a beam BM1A formed in a silicon layer SL1, and a beam BM2A formed in a silicon layer SL2, and a fixed section FU1B and the mass body MS are connected to each other by means of a beam BM1B formed in the silicon layer SL1, and a beam BM2B formed in a silicon layer SL2. Consequently, movement (noise component) different from x-direction displacement (signal component) of the mass body MS can be suppressed, said displacement contributing to improvement of detection sensitivity of x-direction acceleration, and as a result, detection sensitivity of small acceleration in the x direction can be improved. |
