| 摘要 |
According to one aspect of the invention, a capacitive radiofrequency electromechanical microsystem or capacitive RF MEMS comprising a metal membrane (1) suspended above an RF transmission line (3) and resting on ground planes (6a, 6b), and having a lower face (1b), and an upper face (1a) opposite the lower face and a first layer (7) comprising a refractory metal material (Matl) at least partially covering the upper face of the membrane so as to prevent heating of the membrane, is provided. |
