| 摘要 |
The present invention relates to a vaporization system in which a flow passage for mounting a flow rate control device is not formed in a vaporizer and a pipe in the vaporization system is unnecessary to miniaturize the vaporization system. The vaporization system comprises: a vaporizer (21) which vaporizes a liquid material; a supply amount control device (22) which controls the amount of liquid material supplied to the vaporizer (21); and a manifold block (B) which is provided with flow passages therein and has a device mounting face (B1x) for mounting the vaporizer (21) and the supply amount control device (22), wherein the vaporizer (21) and the supply amount control device (22) are mounted on the device mounting face (B1x), thereby being connected through the flow passages (R1 to R4). |
