METHOD OF PREPARING SUBSTRATE

摘要

A SUBSTRATE IS PREPARED BY POLISHING A SURFACE OF THE SUBSTRATE USING A POLISHING PAD WHILE FEEDING A SLURRY. THE POLISHING PAD HAS A POROUS NAP LAYER WHICH COMES IN CONTACT WITH THE SUBSTRATE SURFACE AND IS MADE OF A BASE RESIN COMPRISING AT LEAST THREE RESINS, TYPICALLY AN ETHER RESIN, ESTER RESIN, AND POLYCARBONATE RESIN. THE POLISHED SUBSTRATE HAS A HIGHLY FLAT SURFACE WITH A MINIMAL NUMBER OF DEFECTS.