| 摘要 |
PROBLEM TO BE SOLVED: To provide a super pure water production device and a super pure water production method, capable of inexpensively producing super pure water having high purity in which required water quality is satisfied fully, with reduced footprint.SOLUTION: A super pure water production device comprises: a pretreatment system; a primary pure water system; and a sub system. The primary pure water system comprises, in this order: a high pressure type reverse osmosis membrane separation device; a deaerator; an ultraviolet oxidation device; and an ion exchange device.SELECTED DRAWING: None |
