| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing apparatus capable of further promptly interrupting the supply of power to a measurement target in response to the occurrence of an abnormality, as compared with before.SOLUTION: A testing apparatus 1 for testing a semiconductor 2 includes: a driving signal output unit 5 that supplies a driving signal to a gate of the semiconductor 2; a power supply 4 that supplies a driving power (V1) to the semiconductor 2; a switch circuit 7 that interrupts the supply of the driving power (V1) to the semiconductor 2; and an abnormality detection unit 6 that detects an abnormality of the semiconductor 2 and drives the switch circuit 7. The abnormality detection unit 6 detects an abnormality of the semiconductor 2 on the basis of a gate voltage Vg of the semiconductor 2.SELECTED DRAWING: Figure 1 |
