| 发明名称 |
ONE-PIECE PROCESS KIT SHIELD |
| 摘要 |
Embodiments of process kit shields and process chambers incorporating same are provided herein. In some embodiments, a one-piece process kit shield includes a cylindrical body having an upper portion and a lower portion; a heat transfer channel extending through the upper portion; and a cover ring section extending radially inward from the lower portion. |
| 申请公布号 |
US2016189938(A1) |
申请公布日期 |
2016.06.30 |
| 申请号 |
US201514960890 |
申请日期 |
2015.12.07 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SAVANDAIAH KIRANKUMAR;HANSON RYAN;AN RUXIAO |
| 分类号 |
H01J37/34 |
主分类号 |
H01J37/34 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A one-piece process kit shield, comprising:
a cylindrical body having an upper portion and a lower portion; a heat transfer channel extending through the upper portion; and a cover ring section extending radially inward from the lower portion. |
| 地址 |
Santa Clara CA US |
