发明名称 RADIAL WAVEGUIDE SYSTEMS AND METHODS FOR POST-MATCH CONTROL OF MICROWAVES
摘要 A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals in response to a correction signal. The system also includes first and second electronics sets, each of which amplifies a respective one of the first and second microwave signals. The system transmits the amplified, first and second microwave signals into the radial waveguide, and matches an impedance of the amplified microwave signals to an impedance presented by the waveguide. The system also includes at least two monitoring antennas disposed within the waveguide. A signal controller receives analog signals from the monitoring antennas, determines the digital correction signal based at least on the analog signals, and transmits the correction signal to the signal generator.
申请公布号 US2016189933(A1) 申请公布日期 2016.06.30
申请号 US201615063849 申请日期 2016.03.08
申请人 Applied Materials, Inc. 发明人 Kobayashi Satoru;Park Soonam;Lubomirsky Dmitry;Sugai Hideo
分类号 H01J37/32;H01J37/244 主分类号 H01J37/32
代理机构 代理人
主权项 1. A system that controls microwaves in a radial waveguide, comprising: the radial waveguide; a plurality of electronics sets, wherein each electronics set: receives and amplifies an input microwave signal having a frequency, a phase and an amplitude, to form an amplified microwave signal, andtransmits the amplified microwave signal into a respective location of the radial waveguide,wherein the frequencies of the input microwave signals received by each of the plurality of electronics sets are the same; at least one monitoring antenna within the radial waveguide that provides an analog signal responsive to microwaves at a location of the monitoring antenna; and a controller that receives the analog signal, and in response to the analog signal, adjusts at least one of the phase and the amplitude of the input microwave signal provided to one or more of the plurality of electronics sets, to achieve a predetermined condition at the location of the monitoring antenna.
地址 Santa Clara CA US