METHOD OF MANUFACTURING SINGLE CRYSTAL

摘要

A manufacturing method of single crystal is provided with a melting process for dissolving raw material in a crucible and a pulling-up process of a single crystal from a melt by the Czochralski method. The pulling-up process includes detecting an edge line of a fusion ring, determining an approximated curve of the edge line by approximating the edge line of the fusion ring by an even function, eliminating constituent pixels of the fusion ring from the image of the fusion ring as noise, the constituent pixels being positioned on the side of the melt relative to the approximated curve and the constituent pixels of the fusion ring and a deviation between the constituent pixels and the approximated curve being a predetermined number of pixels, and calculating the center position of the single crystal from the edge line of the fusion ring from which the noise has been eliminated.

主权项

1. A method of manufacturing a single crystal, the method comprising:
a melting process which generates a melt by dissolving raw material in a crucible; and a pulling-up process which pulls up a single crystal from the melt by the Czochralski method, wherein the pulling-up process includes a step of calculating a center position of the single crystal from an image of a fusion ring which appears near a solid-liquid interface between the single crystal and the melt, the step of calculating the center position of the single crystal includes steps of:
detecting an edge line of the fusion ring;determining an approximated curve of the edge line by approximating the edge line of the fusion ring by an even function;eliminating constituent pixels of the fusion ring from the image of the fusion ring as noise, the constituent pixels being positioned on the side of the melt relative to the approximated curve and the constituent pixels of the fusion ring and a deviation between the constituent pixels and the approximated curve being at least a predetermined number of pixels; andcalculating the center position of the single crystal from the edge line of the fusion ring from which the noise has been eliminated.