MULTILAYER STRUCTURE, PACKAGING MATERIAL AND PRODUCT USING SAME, AND PROTECTIVE SHEET FOR ELECTRONIC DEVICE

摘要

The present invention relates to a multilayer structure including a substrate (X) and a layer (Y) layered on the substrate (X), wherein the layer (Y) includes an organic phosphorus compound (BO) and a compound (A) including aluminum, and the exposure dose of sputter ions necessary until the ratio IBO/IA of the intensity IA of negative secondary ions having the highest intensity among secondary ions originating from the compound (A) including aluminum and the intensity IBO of negative secondary ions having the highest intensity among secondary ions originating from the organic phosphorus compound (BO) is 3.10×1012 ions/cm2 to 7.30×1013 ions/cm2 when composition analysis in the depth direction of the layer (Y) is performed using a time-of-flight secondary ion mass spectrometer provided with a bismuth cluster ion (Bi3 2+) source as a primary ion source and a fullerene ion (C60 2+) source as a sputter ion source.